EMAIL: | TEL: +44 (0)1793 881497


Wafer Processing

PRP uses state of the art facilities at Rutherford Appleton Laboratory to design, develop and manufacture their own LEDs. They are also able to offer PRP’s extensive skills and experience in this area to customers who require wafer processing.


Processes available:


• Class 1,000 cleanroom

• Photolithography – conventional mask aligner

• E-beam direct write

• Dielectric deposition – PECVD and sputtered

• Metal deposition – thermal, E-beam and sputtered

• Lift off

• Metal etching (wet and dry)

• Mesa etching (wet and dry)

• Contact sintering / annealing

• Wafer dicing

• Metrology and characterisation – SEM, AFM and profiler



MNT Centre cleanrooms

© STFC 2014

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Please contact us on +44 (0)1793 881497 to discuss your requirements.